Lecture 9: X-Ray Generation and Energy-Dispersive X-Ray Spectroscopy (EDX) in SEM
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Lecture 9: X-Ray Generation and Energy-Dispersive X-Ray Spectroscopy (EDX) in SEM
In this lecture, we build directly on our discussion of inelastic scattering and beam–specimen interactions to examine one of the most powerful analytical signals in the scanning electron microscope: X-ray emission. When high-energy electrons interact with atoms in a specimen, two fundamentally different X-ray generation mechanisms occur ...
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