The attempt to take IC lithography to the 157nm wavelength is forcing manufacturers to seek alternatives to a lens material that could send the price of steppers soaring even higher than today.

SANTA CLARA, Calif. — In a move to keep up with growing demand for its lithography-lens materials, Corning Inc. is aggressively ramping up production of these products in its new plant in Canton, N.Y.

New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on ...

Canon Inc. announced today the release of the FPA-3030i6 i-line[i] stepper, a new semiconductor lithography system for processing wafers with a diameter of 8 inches (200 mm) or smaller. The FPA-3030i6 ...

According to MarketsandMarkets(TM), the Extreme Ultraviolet (EUV) Lithography Market is projected to grow from USD 15.84 billion in 2026 to USD 30.36 billion by 2032, at a CAGR of 11.4%. Browse 116 ...

Exposure toolmaker Nikon said that it has shipped a production version of its immersion lithography scanner, the NSR-S609B. The tool shipped last month, and the Japanese supplier claimed it is the ...

Illuminating silicon wafers with a pattern of light has long been the process of choice for making microelectronics, but there are fears that it will not be able to meet future demands. Steven Brueck, ...

Fig. 1 | Metalens-based DLW lithography. Schematic diagrams of (a) the DLW lithography setup, (b) the metalens and its constructing unit cells. (c) The metalens in top view and cross-section view. (d) ...

Designers of semiconductor lithography equipment have made some impressive strides over the last few years. But soon, they're going to be victims of their own success. Scientists at the National ...